| 金刚石薄膜的表面成分和形貌对表面能的影响 |
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| 引用本文： | 何琨,苟立,冉均国.金刚石薄膜的表面成分和形貌对表面能的影响[J].硅酸盐学报,2010,38(2). |
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| 作者姓名： | 何琨 苟立 冉均国 |
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| 作者单位： | 四川大学无机材料系,成都,610065 |
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| 基金项目： | 国家自然科学基金(10275046)资助项目 |
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| 摘 要： | 采用微波等离子体化学气相沉积法制备了(111)面和(100)面金刚石薄膜。测量了金刚石薄膜与液体的接触角、金刚石薄膜表面粗糙度和电阻率。通过扫描电镜、X射线衍射、X射线光电子能谱研究了金刚石薄膜的表面纯度和形貌等对表面能的影响。结果表明:金刚石纯度越高、表面粗糙度越大、晶粒尺寸越小,其表面能越大。经过空气等离子体后处理的金刚石薄膜的纯度和亲水性明显提高。随着在空气中放置时间的增加,亲水性逐渐减弱。在空气中放置相同时间,O2等离子体后处理的金刚石薄膜比H2等离子体后处理的金刚石薄膜亲水性好。
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| 关 键 词： | 金刚石薄膜 表面形貌 表面能 微波等离子体 改性 |
EFFECT OF SURFACE COMPONENT AND MORPHOLOGY OF DIAMOND FILM ON SURFACE ENERGY |
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| HE Kun,GOU Li,RAN Junguo.EFFECT OF SURFACE COMPONENT AND MORPHOLOGY OF DIAMOND FILM ON SURFACE ENERGY[J].Journal of The Chinese Ceramic Society,2010,38(2). |
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| Authors: | HE Kun GOU Li RAN Junguo |
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| Affiliation: | Department of Inorganic Materials;Sichuan University;Chengdu 610065;China |
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| Abstract: | Diamond films with (100) or (111) plane were grown by the microwave plasma chemical vapor deposition method.The contact angle between liquid and diamond film,surface roughness and resistivity of diamond films were measured.The influence of surface component and morphology of the diamond film on the surface energy were investigated by X-ray diffraction,scanning electron microscope and X-ray photoelectron spectroscopy.The results show that the characteristics of the lower content of non-diamond phase carbon,t... |
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| Keywords: | diamond film surface morphology surface energy microwave plasma modification |
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