| 基于激光干涉的接触式微位移测量仪 |
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| 引用本文： | 王淑珍,谢铁邦.基于激光干涉的接触式微位移测量仪[J].工具技术,2010,44(1):105-108. |
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| 作者姓名： | 王淑珍 谢铁邦 |
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| 作者单位： | 1. 华中科技大学;洛阳理工学院
2. 华中科技大学 |
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| 摘 要： | 介绍的基于激光干涉的微位移测量仪具有分辨率高、结构简单、成本低的特点。该微位移测量仪由基于迈克尔逊激光干涉原理的微位移测量装置、工作台、光电阵列、信号处理电路、计算机及数据处理软件等组成。该测量仪位移测量理论分辨力可以达到0.01nm,特别适合范围在微米及微米以下的位移测量,可用于MEMS器件的位移检测,压电器件位移检测等。
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| 关 键 词： | 计量学 微位移测量 激光干涉 十字片簧铰链 光电阵列 |
Contact Micro Displacement Measuring Instrument Based on Laser Interference |
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| Wang Shuzhen,Xie Tiebang.Contact Micro Displacement Measuring Instrument Based on Laser Interference[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2010,44(1):105-108. |
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| Authors: | Wang Shuzhen Xie Tiebang |
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| Affiliation: | Wang Shuzhen,Xie Tiebang Doctoral C,idate,Associate Professor,Huazhong University of Science , Technology,Wuhan 430074,China |
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| Abstract: | A contact micro-displacement measuring instrument based on laser interference is introduced.It has the characteristics of high resolution,simple structure and low cost.The displacement measuring instrument consists of several parts:the micro-displacement measuring device based on Michelson interferometry using laser,the workbench,the optoelectronic arrays and its signal processing circuit,the computer and data processing software.The theoretical resolution of the displacement measurement may achieve 0.01 nm... |
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| Keywords: | Metrology micro displacement measurement laser interference cross-spring hinge optoelectronic arrays |
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