| Abstract: | NiCr alloys prepared by dc magnetron sputtering are considered to apply simultaneously both the absorption layer and the top electrode on PZT thin films for infrared sensors. NiCr alloys deposited with dc powers of Ni 80 and Cr 50 W showed the most stable oxidation resistance even at 600°C in an oxygen ambient. They have a resistivity of approximately 70 μΩ-cm and a rms roughness of 2.0 nm in samples annealed at 600°C for 5 min in O2. The NiCr/PZT/Pt capacitors showed a well-saturated hysteresis loop having a remanent polarization of 20 μC/cm2. Ultra-thin NiCr alloys showed a possibility as a top electrode for infrared sensors. |
