线性压电马达的动态模拟与性能评估

提出了一个模拟线性压电马达运动特性的动态模型.该模型考虑了马达压电元件的运动顺序,将压电马达视为一个具有变接触刚度与变阻尼系数的两自由度动态系统.其本构方程考虑了压电元件的机-电耦合效应.该模型使用Co-quad图、波特图和根轨迹图进行表述以及实验验证.结果表明,该模型能够预测线性压电马达的运动特性,并可用于改进或设计新的线性压电马达.性能评估表明,实验中使用的线性压电马达具有5 nm的分辨率、20mm/s的行走速度以及220 N的驱动力.

Dynamic Modeling and Capabilities of Linear Piezomotor

A dynamic model is presented to simulate the motion characteristics of a linear piezomotor. With the consideration of the sequential motions of the piezoelectric actuators in the piezomotor, the nodel handles the piezomotor as a two-degees-of-freedom dynamic system with varying interface stiffness and damping coefficient. It incorporates the electro-mecha nical coupling effect into its governing equations. The model is demonstrated using Co-quad plots, Bode plots and root locus techniques, and verified with an experimental study. It turns out that the model can predict the motion characteristics of the linear piezomotor. The model can be used to improve the performance of the existing linear piezomotors and to help design new linear piezomotors. The capabilities of the linear piezomotor are also evaluated by the experimental study, which shows that the piezomotor has positioning resolution of 5 nm, traveling speed of 20 mm/s, and output force of 220 N.