等离子体浸没离子注入改善45钢的摩擦学性能

采用灯丝放电和射频(RF)辉光放电等离子体浸没离子注入(PⅢ)工艺对45钢表面进行了氮离子注入强化处理。通过X射线光电子能谱(XPS)、扫描电子显微镜(SEM)、显微硬度、针-盘磨损和电化学腐蚀试验等测试手段，分析比较了经灯丝放电PⅢ和RF辉光放电PⅢ改性后试样表面元素的浓度分布、显微硬度、摩擦磨损性能和耐腐蚀性能。结果表明：不同条件下的氮离子注入均能提高45钢表面的显微硬度、耐磨性和抗腐蚀性能；且RF辉光放电PⅢ处理后试样的显微硬度提高了76．8％，摩擦系数下降到0．3，与灯丝放电PⅢ处理后的试样相比，其表面强化效果更加明显。

Improvement Tribological Properties of 45 Steel by Plasma Immersion Ion Implantation

Surface modification of 45 steel was investigated by hot filament gas discharge and radio-frequency (RF) glow discharge nitrogen plasma immersion ion implantation (PIII) techniques. The chemical composition and microstructure of the modified layer were characterized by X-ray Photoelectron Spectroscopy (XPS) and Scanning Electron Microscopy(SEM), respectively. The microhardness, friction and wear behavior, corrosion resistance were also evaluated. The results reveal that the surface properties of 45 steel are enhanced by the two kinds of PIII,however,the RF glow discharge PIII produces the improvement of the surface properties more markedly. The microhardness increases by 76 8%, friction coefficient decreases to 0 3, and the corrosion resistance of the samples treated by RF glow discharge PIII is improved significantly.