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Ti-Ta-O复合薄膜的制备及抗腐蚀性
引用本文:陈吉华,杨大智,刘敬肖,王伟强. Ti-Ta-O复合薄膜的制备及抗腐蚀性[J]. 材料研究学报, 2001, 15(5): 587-592
作者姓名:陈吉华  杨大智  刘敬肖  王伟强
作者单位:1. 大连理工大学三束材料表面改性国家重点联合实验室,大连市 116024
2. 大连理工大学三束材料表面改性国家重点联合实验室
3. 大连理工大学三束材料表面改性国家重点联合实验室;大连轻工业学院
基金项目:国家科技部基础司资助项目国科高字6-079-4-05,八六三计划新材料领域资助项目715-002-0240,国家自然科学基金
摘    要:采用离子束增强沉积法在NiTi基体上合成了具有不同组分比的Ti-Ta-O薄膜。研究了组分比对薄膜的相结构、力学性能和抗模拟体液腐蚀性的影响。SEM,AFM和XRD分析表明,所有薄膜均由纳米粒子堆积而成,膜层连续光滑,纯Ti-O膜为金红石结构,而Ti-Ta-O膜为非晶态,划痕实验、显微硬度分析和电化学测试研究表明,加入Ta后,膜与基体间的结合强度、韧性和抗腐蚀性增强,显微硬度下降。Ta含量为36%(原子分数)的膜使NiTi的抗蚀性显著提高。

关 键 词:离子束增强沉积 Ti-Ta-O薄膜 模拟体液 抗腐蚀性 镍钛合金 表面改性 生物医学材料 钛 钽 复合氧化物 薄膜
文章编号:1005-3093(2001)05-0587-06
修稿时间:2000-10-12

SYNTHESIS AND CORROSION RESISTANCE OF Ti-Ta-O COMPOSITE FILM BY ION BEAM ENHANCED DEPOSITION
CHEN Jihua,YANG Dazhi,LIU Jingxiao,WANG Weiqiang. SYNTHESIS AND CORROSION RESISTANCE OF Ti-Ta-O COMPOSITE FILM BY ION BEAM ENHANCED DEPOSITION[J]. Chinese Journal of Materials Research, 2001, 15(5): 587-592
Authors:CHEN Jihua  YANG Dazhi  LIU Jingxiao  WANG Weiqiang
Abstract:Ti-Ta-O films with difFerent compositions were synthesized on NiTi substrates by lon Beam Enhanced Deposition and examined by SEM, AFM, XRD and etc. The dependence of the Structure, mechanical properties and corrosion resistance in SBF of the film on its composition was studied. AIl the films were dense, unifOrm and composed of nano--sized particIes. The pure Ti-O film existed in the fOrm of rutile Structure, while the films containing Ta were in amorphous State. The scratch teSt, microhardness anaIysis and electrochemical measurement showed that the adhesive strength, toughness and corrosion resistance were improved by the addition of Ta, while the microhardness was reduced. 36% (atomic fraction) is optimum content of Ta for improving corrosion resistance.
Keywords:ion beam enhanced deposition   Ti-Ta-O film   simulated body fluid   corrosion resis- tance
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