Hydrocarbon impurities in SiF4 and SiH4 prepared from it |
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| Authors: | A. D. Bulanov P. G. Sennikov V. A. Krylov T. G. Sorochkina L. A. Chuprov O. Yu. Chernova O. Yu. Troshin |
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| Affiliation: | (1) Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, Nizhni Novgorod, 603950, Russia |
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| Abstract: | Using gas chromatography and high-resolution Fourier-transform IR spectroscopy, we have determined the concentrations of C1–C4 hydrocarbon impurities in isotopically unmodified silicon tetrafluoride before and after fine purification and in 28Si-enriched SiF4. The concentrations of C1–C4 hydrocarbon impurities in silicon tetrafluoride for SiH4 synthesis have been shown to correlate with those in the synthesized silane. |
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