Interferometric measurement using bimorph actuated staggered mirror (BASM) microsensor |
| |
Authors: | Si-Hyung Lim Hong Jae Yim |
| |
Affiliation: | (1) School of Mechanical and Automotive Engineering, Kookmin University Jeongneung-dong, Sungbuk-gu, Seoul, Korea |
| |
Abstract: | For physical and chemical sensing applications, a bimorph actuated staggered mirror (BASM) microsensor was designed and fabricated
by surface micromachining using a transparent quartz substrate. While the conventional cantilever sensors have angular deflection,
BASM’s moving mirror performs piston-type pure vertical motion in response to environmental stimuli like temperature change
and surface stress change due to molecular adsorption. Since the sensor itself has a fixed or reference mirror as well as
a moving mirror, 1) an interferometric measurement is possible without an additional reference mirror in off-axis measurement
setup, and 2) vibration measurement noise can be reduced. For preliminary test purposes, interferometric measurement using
an optical setup was performed for temperature change. At He-Ne line (632.8 nm), a temperature change of ∼0.8 K caused a minimum-to-maximum
interferometric light intensity change which corresponds to ∼144 nm shift of the moving mirror part. An optical diffraction
analysis was performed and optimal device parameters were found to maximize the sensor sensitivity. |
| |
Keywords: | Interferometry Bimorph Physical sensor Chemical sensor Micro mirror Optical diffraction |
本文献已被 SpringerLink 等数据库收录! |
|