| 一种精密X-Y扫描台的研究 |
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| 引用本文： | 张二星.一种精密X-Y扫描台的研究[J].光学精密工程,1997,5(2):89-92. |
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| 作者姓名： | 张二星 |
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| 作者单位： | 中国科学院长春光学精密机械研究所 |
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| 摘 要： | 探讨了一种精密的X-Y扫描工作台,论证其主要技术指标,介绍其结构特点,同时也进行理论分析,最后讨论其应用。
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| 关 键 词： | X－Y扫描台 扫描机构 定位精度 |
| 收稿时间： | 1997-01-29 |
Research on a Precision X Y Scanning Stage |
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| Zhang Erxing.Research on a Precision X Y Scanning Stage[J].Optics and Precision Engineering,1997,5(2):89-92. |
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| Authors: | Zhang Erxing |
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| Affiliation: | Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun, 130022 |
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| Abstract: | This paper researches on a precision X Y scanning stage,deals with its main technical specifications,introduces its design features,and also makes theoretical analysis,and finally discusses its utilization. |
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| Keywords: | X Y scanning stage Scanning mechanism Posisioning accuracy |
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