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OH-related capacitance-voltage recovery effect in MOS capacitors passivated by ZnO-B2O3-SiO2-P2O5 glasses part VIIIthe effects of SrF 2 and BeO contents |
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| Authors: | Keiji Kobayashi Ichiro Mizushima |
| Affiliation: | (1) Toshiba ULSI Research and Development Center, 1-Komukai, Toshiba-cho Kawasaki, Japan |
| Abstract: | |
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