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UV‐Assisted Low Temperature Oxide Dielectric Films for TFT Applications |
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| Authors: | Jaeeun Hwang Kyungmin Lee Yesul Jeong Yong Uk Lee Christopher Pearson Michael C Petty Hongdoo Kim |
| Abstract: | |
| Keywords: | UV‐assisted annealing gate insulator oxide dielectrics metal nitrate ZnO TFT |