| 微辐射热计的光学与热学设计 |
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| 引用本文： | 董良 岳瑞峰 刘理天. 微辐射热计的光学与热学设计[J]. 红外与毫米波学报, 2003, 22(2): 109-113 |
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| 作者姓名： | 董良 岳瑞峰 刘理天 |
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| 作者单位： | 清华大学微电子学研究所,北京,100084 |
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| 基金项目： | 国家自然科学基金 (批准号 5 9995 5 5 0 1)，清华大学“985”基金资助项目~~ |
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| 摘 要： | 针对四臂微桥结构的微辐射热计的光学和热学设计，分析了Si02红外吸收层／poly-Si热敏感薄膜电阻层／Si02支撑薄膜层的多层薄膜的光学特性，研究了Si02红外吸收层的厚度对多层膜系平均红外吸收率的影响。与常规设计思想不同的是，没有假设微辐射热计的平均红外吸收率一定，而将不同厚度的Si02红外吸收层所对应的膜系平均红外吸收率用于微桥的热学设计中，通过有限元分析软件ANSYS5。7，得到Si02红外吸收层的最佳厚度，并对微桥支撑臂进行了优化设计。
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| 关 键 词： | 微辐射热计 光学设计 热学设计 红外吸收率 红外焦平面阵列 微测辐射热计 红外辐射 |
| 收稿时间： | 2002-03-25 |
| 修稿时间： | 2002-03-25 |
OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER |
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| DONG Liang YUE Rui Feng LIU Li Tian. OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER[J]. Journal of Infrared and Millimeter Waves, 2003, 22(2): 109-113 |
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| Authors: | DONG Liang YUE Rui Feng LIU Li Tian |
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| Abstract: | Optical and thermal designs of microbolometer with four leg microbridge were described. The optical characteristic of multilayer structure consisting of SiO 2 infrared absorber film / poly Si thermosensitive film / SiO 2 support film was analyzed, and the influence of SiO 2 infrared absorber film thickness on multilayer structure average absorptirity was investigated. During thermal design, the average infrared absorptivity of microbolometer is not fixed as a constant but changed with thickness of absorber film, which is different from the conventional method. The optimized thickness of infrared absorber film and length of support leg were achieved through Finite Element Analysis software ANSYS5.7. |
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| Keywords: | microbolometer infrared absorptivity optical design thermal design. |
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