基于d15变形压电致动器动静耦合激励分析

为研制一种大行程、高精度的压电致动器,以夹心式换能为机理,提出一种基于d_(15)动静耦合激励的新型压电致动器。对比优化设计的Cymbal压电叠堆与普通压电叠堆,分析了3种致动模式:d_(31)模式、d_(33)模式和d_(15)模式。利用有限元仿真方法和相关测量试验分析了机构的位移输出量,得到在有限元仿真软件平台中,Cymbal压电叠堆能有效地将d_(15)径向变形转化为轴向变形,其d_(15)模式形变量是d_(31)模式形变量的6.35倍,是d_(33)模式形变量的1.66倍;压电致动器在d_(15)动静耦合激励下的最大位移输出量(8.78×10~(-4) m)是d_(15)静态直流激励(6.45×10~(-5) m)的13.61倍,是d_(15)谐振交流激励(7.80×10~(-4) m)的1.13倍。测量试验发现,压电致动器产生的最大输出位移随着电压的增大呈近似线性增加,当电压为100V时,压电致动器产生的最大输出位移为8.11×10~(-4) m,证明了d_(15)致动模式下动静耦合激励的可行性。

Piezoelectric Actuator Based on d 15 Dynamic-Static Coupled Excitation

In order to develop a large-stroke, high-precision piezoelectric actuator, optimized Cymbal piezoelectric stack and common piezoelectric stack are compared, and three actuation modes,d31 mode, d33 mode and d15 mode are analyzed. Based on the principle of sandwich transducer, a new piezoelectric actuator based on d15 dynamic-static coupled excitation is proposed, and the displacement output of the actuator is analyzed. In the finite element simulation software platform, Cymbal piezoelectric stack can effectively convert d15 radial deformation into axial deformation, Its d15 mode deformation is 6.35 times of the d31 mode, and 1.66 times of the d33 mode. The maximum displacement output (8.78×10?4 m) of the piezoelectric actuator based on d 15 dynamic-static coupled excitation is 13.61 times of d15 static direct current (DC) excitation(6.45×10?5m), and 1.13 times of d15 resonant alternating current (AC) excitation(7.80×10?4 m), there is an obvious increase in displacement.