| 步距规校准装置 |
| |
| 引用本文： | 王为农,裴丽梅,任国营,夏阳. 步距规校准装置[J]. 计量学报, 2009, 30(Z1). DOI: 10.3969/j.issn.1000-1158.2009.z1.041 |
| |
| 作者姓名： | 王为农 裴丽梅 任国营 夏阳 |
| |
| 作者单位： | 1. 中国计量科学研究院,北京,100013
2. 北京市计量检测科学研究院,北京,100029 |
| |
| 摘 要： | 利用坐标测量机和激光干涉仪的信号合成技术,构成步距规校准装置,实现多示值标准器的高精度校准.介绍了仪器的构成、原理、软件框图等,并进行了详细的不确定度分析.
|
| 关 键 词： | 计量学 校准装置 步距规 坐标测量机 激光干涉仪 |
Calibration System for Step Gauge |
| |
| WANG Wei-nong,PEI Li-mei,REN Guo-ying,XIA Yang. Calibration System for Step Gauge[J]. Acta Metrologica Sinica, 2009, 30(Z1). DOI: 10.3969/j.issn.1000-1158.2009.z1.041 |
| |
| Authors: | WANG Wei-nong PEI Li-mei REN Guo-ying XIA Yang |
| |
| Abstract: | Combining coordinate measuring machine (CMM) with laser interferometer, a calibration system for step gauge is developed. It can provide calibration service for multi-size standard with high accuracy. The structure, principle and schematic diagram of the software are described, and the uncertainty analysis of the system is presented. |
| |
| Keywords: | Metrology Measurement system Step gauge Coordinate measuring machine Laser interferometer |
| 本文献已被 万方数据 等数据库收录！ |
|
