| 锁相技术在电子束曝光机工件台稳速控制中的应用 |
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| 引用本文： | 魏守水,付光达.锁相技术在电子束曝光机工件台稳速控制中的应用[J].微细加工技术,1996(2):7-11. |
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| 作者姓名： | 魏守水 付光达 |
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| 作者单位： | [1]山东工业大学自动控制系 [2]山东建工学院机电系 |
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| 摘 要： | 采用锁相技术，对电子束曝光机工件台运动实现速度环的全数字控制。设计了数字差频积分回路和数字差频比例控制器，能有效消除速度的静态误差和改善系统的动态特性。
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| 关 键 词： | 电子束曝光机 工件台 锁相技术 稳速控制 |
APPLICATION OF PHASE-LOVKED METHOD IN CONSTANT SPEED CONTROL OF STAGE OF EB EXPOSURE MACHINE |
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| Wei Shoushui, Zhang Yulin.APPLICATION OF PHASE-LOVKED METHOD IN CONSTANT SPEED CONTROL OF STAGE OF EB EXPOSURE MACHINE[J].Microfabrication Technology,1996(2):7-11. |
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| Authors: | Wei Shoushui Zhang Yulin |
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| Abstract: | The movement of stage of EB exposure machine has been controlled digitally by the speed loop with phase-locked method.The digital inlegrator circuit and proportional control circuit of differential frequency are designed to eliminate static error of the speed and improved the dynamic characteization of the system effectively. |
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| Keywords: | electron beam exposure machine stage phase-locked method speed stabilization |
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