Influence of Field Strength and Energy Distribution of Different Barrier Discharge Arrangements on Ozone Generation

Because of different field strength and energy density distributions in volume (VD), surface (SD) and coplanar discharge (CD) arrangements the ozone yield will differ in general. While in VD configurations the initial field strength distribution is rather uniform, the situation is quite different in CD and especially SD devices. The distributions change during discharge development as well as the energy density in the discharge region and by this the ozone yields. The situation in SD arrangements is discussed in detail and is compared with those in VD and CD configurations.