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超精密渐开线齿形的测量方法
引用本文:王立鼎,娄志峰,王晓东,马勇,张玉玲.超精密渐开线齿形的测量方法[J].光学精密工程,2006,14(6):980-985.
作者姓名:王立鼎  娄志峰  王晓东  马勇  张玉玲
作者单位:大连理工大学,精密与特种加工教育部重点实验室,辽宁,大连,116023;大连理工大学,微纳米技术及系统辽宁省重点实验室,辽宁,大连,116023;大连理工大学,精密与特种加工教育部重点实验室,辽宁,大连,116023;中国科学院,长春光学精密机械与物理研究所,吉林,长春,130033
摘    要:分析了双基圆盘式渐开线测量仪的测量原理,其具有结构简单、测量过程中无测头位置引起的阿贝误差等特点。该仪器采用交叉弹簧片的铰链结构作为误差传递杠杆,其灵敏度高、无间隙。经过对仪器的主要测量误差源进行补偿后,其系统的测量不确定度(U95)<±0.5 μm,测量精度可以满足1级渐开线齿形的测量要求。通过与其它渐开线齿形测量方法的比较,双基圆盘式渐开线测量仪仅在测量自动化和多功能性等方面不如CNC齿形量仪,其在测量精度与制造经济性等方面更具优势,是超精密渐开线齿形测量的理想方法。

关 键 词:精密齿轮  渐开线齿形  测量原理  双盘式测量仪
文章编号:1004-924X(2006)06-0980-06
收稿时间:2006-09-15
修稿时间:2006-10-26

Measuring methods of ultraprecision involute tooth profile
WANG Li-ding,LOU Zhi-feng,WANG Xiao-dong,MA Yong,ZHANG Yu-ling.Measuring methods of ultraprecision involute tooth profile[J].Optics and Precision Engineering,2006,14(6):980-985.
Authors:WANG Li-ding  LOU Zhi-feng  WANG Xiao-dong  MA Yong  ZHANG Yu-ling
Affiliation:1. Key Laboratory for Precision &; Non-traditional Machining of Ministry of Education, Dalian University of Technology, DaLian 116023, China;
2. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, DaLian 116023, China;
3. Changchun Institute of Optics, Fine Mechanics and Physics Chinese Academy of Sciences, ChangChun 130033, China
Abstract:A double-disc mode instrument for measuring involute tooth profile is analyzed, which has some advantages, such as simple structure, no Abbe error caused by the stylus, etc. The instrument adopts an intersect coach spring structure as the error transfer lever, which has high sensitivity and no gap. After compensating major measurement error sources, the double-disc mode instrument's uncertainty of measurement (U95) is less than ±0.5 μm, which can meet measurement specification of the involute tooth profile of level 1 gear. Comparing with CNC instruments for measuring gear tooth profile, the double-disc instrument's automation and multifunction performance are insufficient, but it has advantages in accuracy of measurement and manufacturing economical efficiency, etc. The result shows that the double-disc mode is an ideal method for measuring ultraprecision involute tooth profile.
Keywords:precision gear  involute tooth profile  measuring principle  double-disc mode instrument
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