Distance measurement sensor with PIN-photodiode and bridge circuit

The presented integrated optical distance measurement sensor works on the time-of-flight principle. The distance information is obtained from the correlation of received light and the transmitted signal. The PIN-bridge circuit concept ensures suppression of background light by equally charging and discharging the capacitor within one period, while integrating the wanted signal. The advantages of the included PIN-photodiode are high bandwidth f/sub 3 dB/>1.35 GHz together with high responsivity R=0.36 A/W at 660 nm. A single distance measurement is performed in 2 ms. With averaging, an accuracy of better than 1% is achieved for distances up to 3.7 m. Effective pixel size is 250/spl times/200 /spl mu/m/sup 2/ having a fill-factor of /spl sim/16%. The sensor was manufactured in a 0.6-/spl mu/m BiCMOS process.