| MEMS光开关及其与光纤组装方式的研究 |
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| 引用本文： | 朱晓蕊,罗元,李向东,黄尚廉. MEMS光开关及其与光纤组装方式的研究[J]. 半导体技术, 2002, 27(11): 7-10. DOI: 10.3969/j.issn.1003-353X.2002.11.003 |
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| 作者姓名： | 朱晓蕊 罗元 李向东 黄尚廉 |
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| 作者单位： | 1. 重庆大学光电学院,重庆,400044;2. 重庆光电技术研究所,重庆,400060 |
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| 基金项目： | 重庆市科技攻关项目;679 5; |
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| 摘 要： | 光开关是一种在光路中应用极其广泛的光无源器件,可用于扫描、投影、通讯等多种不同的领域,其中用于全光通讯中连接光纤之间的光开关日渐成为人们关注的焦点.高性能、低成本、又能大量生产的MEMS光开关很好地满足了全光网络对器件的要求.本文对这种MEMS光纤光开关的类型、特点以及研究现状进行了介绍,并给出了MEMS光开关与输入输出光纤的组装与自组装以及主要方式.
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| 关 键 词： | 光开关 光纤 MEMS 自组装 |
| 文章编号： | 1003-353X(2002)11-0007-04 |
Research of MEMS optical switch and assembly methods with fiber |
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| ZHU Xiao-rui,LUO Yuan,LI Xiang-dong,HUANG Shang-lian. Research of MEMS optical switch and assembly methods with fiber[J]. Semiconductor Technology, 2002, 27(11): 7-10. DOI: 10.3969/j.issn.1003-353X.2002.11.003 |
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| Authors: | ZHU Xiao-rui LUO Yuan LI Xiang-dong HUANG Shang-lian |
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| Affiliation: | ZHU Xiao-rui1,LUO Yuan1,LI Xiang-dong2,HUANG Shang-lian1 |
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| Abstract: | Optical switch is a kind of important optical components without power supply. It canbe used in various fields such as scanning, projecting, communication and so on. As the communi-cation business is developed rapidly, the research of optical switch used to connect the fibers inAON (All-Optic Network) readily becomes a hot topic. In addition, MEMS optical switch has ex-cellent performance, low price and the ability to manufacture in large scale. The research, classifi-cation and characteristic of MEMS fiber optical switch are introduced. And the assembly and self-assembly methods for MEMS optical switch, input and output fibers are presented. |
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| Keywords: | optical switch optical fiber MEMS self-assembly |
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