| 一种新型CMOS兼容湿度传感器 |
| |
| 引用本文： | 顾磊,黄庆安,秦明,张中平,严先蔚. 一种新型CMOS兼容湿度传感器[J]. 半导体学报, 2004, 25(2): 174-178 |
| |
| 作者姓名： | 顾磊 黄庆安 秦明 张中平 严先蔚 |
| |
| 作者单位： | 东南大学MEMS教育部重点实验室,南京,210096;东南大学MEMS教育部重点实验室,南京,210096;东南大学MEMS教育部重点实验室,南京,210096;东南大学MEMS教育部重点实验室,南京,210096;东南大学MEMS教育部重点实验室,南京,210096 |
| |
| 摘 要： | 给出了与CMOS工艺兼容的一种新型梳齿状湿度传感器的结构、工艺流程及其测试结果.利用Coventor软件对这种新型结构进行了理论分析,对制备出的湿度传感器的性能如灵敏度、滞回特性、重复性、响应时间等进行了测试并讨论.结果表明文中提出的CMOS湿度传感器工艺简单、响应时间快、成本低、灵敏度高,有望在实际中得到应用.
|
| 关 键 词： | 湿度传感器 微电子机械系统 CMOS MEMS |
| 文章编号： | 0253-4177(2004)02-0174-05 |
| 修稿时间： | 2003-02-13 |
A Novel Humidity Sensor Compatible with CMOS Technology |
| |
| Gu Lei,Huang Qing''''an,Qin Ming,Zhang Zhongping and Yan Xianwei. A Novel Humidity Sensor Compatible with CMOS Technology[J]. Chinese Journal of Semiconductors, 2004, 25(2): 174-178 |
| |
| Authors: | Gu Lei Huang Qing''''an Qin Ming Zhang Zhongping Yan Xianwei |
| |
| Abstract: | A new comb structure of capacitive humidity sensor is described,which is fabricated by a standard CMOS process to achieve an effective solution for accurate and reliable humidity measurement.The structure is analyzed by using the Coventor softwave.The capacitance of RH sensor is measured and the processes of absorption and desorption are compared clearly.The measured results show that the hysteresis,repeated property,and the sensitivity of the sensor can be precisely calibrated.The result indicates also that the novel humidity sensor may be applied in practice. |
| |
| Keywords: | humidity sensor MEMS CMOS integrated sensor |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《半导体学报》浏览原始摘要信息 |
|
点击此处可从《半导体学报》下载全文 |
|
