| N+注入金属薄膜晶体生长的实验研究 |
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| 引用本文： | 徐送宁,孙树滋.N+注入金属薄膜晶体生长的实验研究[J].沈阳理工大学学报,1999,18(4):26-29. |
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| 作者姓名： | 徐送宁 孙树滋 |
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| 作者单位： | 1. 沈阳工业学院基础课部,沈阳110015
2. 东北大学 |
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| 摘 要： | 研究沉积在相同异反衬底NaCl上的Ag、Au、Al三种金属薄膜，在N＋注入后晶体生长情况和N＋在薄膜中的分布情况．探讨晶体生长与注入条件的关系．
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| 关 键 词： | 离子注入 注入剂量 衬底 晶体生长 |
| 修稿时间： | :1999-05-1 |
Experimental Study on Crystal Growth by N+ Implanted Metal Films |
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| Xu Songning,Sun Shuzi.Experimental Study on Crystal Growth by N+ Implanted Metal Films[J].Transactions of Shenyang Ligong University,1999,18(4):26-29. |
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| Authors: | Xu Songning Sun Shuzi |
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| Affiliation: | Xu Songning
(Dept. of Basic Courses ,Shenyang Institute of Technology,Shenyang 110015)
Sun Shuzi
(Northeastern University) |
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| Abstract: | The crystal growth was studied when N was implanted into Ag,Au andAl films on substrate NaCl. N distribution in Ag film and the relation between crystalgrowth and implantation condition were investigated. |
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| Keywords: | ion implantation dose substrate crystal growth |
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