高频锁相激光干涉仪技术纳米定位系统

提出了一种基于高频相移电子电路驱动的压电陶瓷执行器和外差式迈克尔逊激光干涉仪的纳米位置控制方法,该方法结合双轴机械传输导轨组成了高精度大量程纳米定位系统.系统实现步长为4.945 nm的直线位移,步长的相对不确定度为1.6×10-9,1μm行程误差重复性为0.1 nm,5 mm往返行程误差重复性为0.4 nm.该方法对纳米技术与计量界在纳米刻度上的操作控制都是很有用的.

Nanometric position system based on high frequency phase-locked laser interferometer

One method of nanometric positioning control based on piezoelectric actuators driven by a high frequency phase shifting electronic circuit and a heterodyne Michelson's interferometer is presented.This method with a two-axis mechanic motor stage composes a system of high accuracy with long range displacement.This system can realize the displacement of a translation stage with a known step of 4.945 nm.Instrinc relative uncertainty on the step value is 1.6×10~(-9).Repeatability of 0.1 nm has been obtained over 1 μm displacement range,and repeatability of 0.4 nm over 5 mm forth-and-back displacements.This method could be very useful for the nanotechnology and nanometrology communities for nano-scale manipulations.