| 溅射型应变计及其检测压力的应用 |
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| 引用本文： | 孙丽杰,彭宇.溅射型应变计及其检测压力的应用[J].传感器与微系统,1991(6):38-39,45. |
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| 作者姓名： | 孙丽杰 彭宇 |
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| 作者单位： | 哈尔滨通江晶体管厂
(孙丽杰)，哈尔滨通江晶体管厂(彭宇) |
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| 摘 要： | 本文介绍了溅射型应变计的特点、结构与制造工艺及其在检测压力上的应用。
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| 关 键 词： | 溅射 |
Sputter-type Strain Gauge and Its Application in Pressure Measurement |
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| Sun Lijie Peng Yu.Sputter-type Strain Gauge and Its Application in Pressure Measurement[J].Transducer and Microsystem Technology,1991(6):38-39,45. |
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| Authors: | Sun Lijie Peng Yu |
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| Abstract: | The properties,constructure and technique of sputter-type strain gauge and its application in pressune measurement are presented. |
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| Keywords: | Sputter |
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