三氯氢硅制备工艺介绍

从工艺流程、工艺特点、核心设备结构等方面介绍了国内两种生产多晶硅所需的三氯氢硅制备工艺:改良西门子法和氯氢化法。前者以硅粉和氯化氢为原料制备三氯氢硅,其原料来源广、价格低廉;而后者以难处理的四氯化硅与氢气、硅粉、氯化氢为原料制备三氯氢硅,解决了四氯化硅的出路,提高了物料的利用率。两者均能降低能耗,减少污染,对社会、经济、环境具有重要意义。

Preparation process of trichlorosilane

Two preparation processes of trichlorosilane for producing polysilicon are described including process flow, process characteristics and structure of core equipment. The raw materials of improved Siemens process are silica powder and hydrogen chloride, which has wide material sources and low cost. The raw materials of hydrochlorination process are silicon tetrachloride, hydrogen, silica powder and hydrogen chloride, which provide an outlet for unwieldy silicon tetraehloride and enhance the utilization rate of materials. Both of the processes have advantages of low energy consumption and less pollution, which is important for society, economy and environment.