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Criteria for versatile GaN MOVPE tool: high growth rate GaN by atmosphericpressure growth
Authors:Koh Matsumoto  Kazutada Ikenag  Jun Yamamoto  Kazuki Naito  Yoshiki Yano  Akinori Ubukat  Hiroki Tokunag  Tadanobu Arimur  Katsuaki Cho  Toshiya Tabuchi  Akira Yamaguchi  Yasuhiro Harad  Yuzaburo Ban  Kousuke Uchiyama
Affiliation:TN-EMC Ltd, 2008-2 Wada, Tama, Tokyo 206-0001, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;TN-EMC Ltd, 2008-2 Wada, Tama, Tokyo 206-0001, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;Business Strategy Planning div. Electronics Group, TAIYO NIPPON SANSO Corporation, 10 Okubo,Tsukuba 300-2611, Japan;Compound-semiconductor Division, TAIYO NIPPON SANSO Corp., 6-2 Kojimacho, Kawasaki-shi, 210-0861, Japan;TN-EMC Ltd, 2008-2 Wada, Tama, Tokyo 206-0001, Japan;TN-EMC Ltd, 2008-2 Wada, Tama, Tokyo 206-0001, Japan;TN-EMC Ltd, 2008-2 Wada, Tama, Tokyo 206-0001, Japan
Abstract:
Keywords:MOVPE  GaN: AlGaN  atmospheric pressure growth  high growth rate
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