| 基于薄膜体声波谐振器的免疫球蛋白传感器制备 |
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| 引用本文： | 杨翰林,陈达,刘一剑,沈勇,张亚非. 基于薄膜体声波谐振器的免疫球蛋白传感器制备[J]. 传感器与微系统, 2015, 0(8): 80-82. DOI: 10.13873/J.1000-9787(2015)08-0080-03 |
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| 作者姓名： | 杨翰林 陈达 刘一剑 沈勇 张亚非 |
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| 作者单位： | 1. 上海交通大学 电子信息与电气工程学院,上海,200240;2. 山东科技大学 电子通信与物理学院,山东 青岛,266590 |
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| 基金项目： | 国家“973”计划资助项目 |
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| 摘 要： | 研制了一种基于薄膜体声波谐振器（ FBAR）的生物免疫球蛋白传感器，该FBAR采用AlN作为压电层，3对Ti/W金属层作为布拉格声学反射层，工作频率为2.047 GHz，回波损耗为－32 dB。利用自组装膜法修饰顶部金电极敏感区域。测试了免疫球蛋白G抗体和抗原的特异性结合前后传感器的指标变化。结果得到传感器的Q值和灵敏度分别达到846，3.38 kHz·cm2/ng，远高于广泛使用的石英晶体微天平（ QCM），具有广阔的应用前景。
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| 关 键 词： | 薄膜体声波谐振器 自组装膜法 生物传感器 |
Fabrication of immune globulin sensor based on film bulk acoustic resonator |
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| YANG Han-lin,CHEN Da,LIU Yi-jian,SHEN Yong,ZHANG Ya-fei. Fabrication of immune globulin sensor based on film bulk acoustic resonator[J]. Transducer and Microsystem Technology, 2015, 0(8): 80-82. DOI: 10.13873/J.1000-9787(2015)08-0080-03 |
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| Authors: | YANG Han-lin CHEN Da LIU Yi-jian SHEN Yong ZHANG Ya-fei |
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| Abstract: | An immune globulin( IG)sensor based on thin film bulk acoustic resonator( FBAR)is presented, which works at 2. 047 GHz with -32 dB return loss,consisting of an AlN piezoelectric stack and three pairs of Ti/W Bragg reflector. Self-assembled monolayers( SAMs )are applied to modify the top Au electrode sensitive area. Index changes of sensor before and after combination of antigen and antibody of IG are test. The Q factor of sensor is calculated as high as 846 and the sensitivity as a biosensor can reach 3. 38 kHz·cm2/ng which much higher than that of QCM. Through the antibody detection experiment,the FBAR is proved to have the potential of exhibiting a more crucial effect in the biosensor field. |
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| Keywords: | film bulk acoustic resonator( FBAR) self-assembled monolayers biosensor |
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