GEMGrid: a wafer post-processed GEM-like radiation detector

This paper presents a new wafer post-processed micropatterned gaseous radiation detector called GEMGrid. The device consists of a GEM-like structure fabricated with SU-8 photoresist directly on top of a Timepix chip with zero gap distance. The detector characteristics have been studied in several gas mixtures. The device is capable of tracking minimum ionizing particles and exhibits good energy resolution on ⁵⁵Fe decays. We further show a strongly improved mechanical robustness of these GEM-like structures as compared to a pillar-supported integrated Micromegas.