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带框LTCC生瓷烘干技术
引用本文:周峻霖,夏俊生,侯育增,洪明.带框LTCC生瓷烘干技术[J].电子与封装,2011,11(4):6-11.
作者姓名:周峻霖  夏俊生  侯育增  洪明
作者单位:华东光电集成器件研究所;中国人民解放军驻九三七三厂军事代表室;
摘    要:在LTCC基板加工中,生瓷预烘干、图形印刷后烘干可能会产生中心位置塌陷、破损、翘曲等形变问题.而LTCC是通过加工多层生瓷、按一定顺序准确对准,再层压、切割后共烧而成,为满足产品平整度及位置对准精度要求,我们必须解决各层烘干过程中存在的形变问题,保证每一层生瓷加工质量.文章介绍了LTCC基板制造过程中带框生瓷烘干的工艺...

关 键 词:带框LTCC生瓷  烘干  LTCC(低温共烧陶瓷)

Frame-mounted LTCC Green Tape Curing Technology
ZHOU Jun-lin,XIA Jun-sheng,HOU Yu-zeng,HONG Ming.Frame-mounted LTCC Green Tape Curing Technology[J].Electronics & Packaging,2011,11(4):6-11.
Authors:ZHOU Jun-lin  XIA Jun-sheng  HOU Yu-zeng  HONG Ming
Affiliation:ZHOU Jun-lin1,XIA Jun-sheng1,HOU Yu-zeng1,HONG Ming2(1.East China Institute of Photo-Electron ICs,Bengbu 233042,China,2.PLA Representative Bureau Office stationed at No.9373 Factory,Bengbu 233000,China)
Abstract:During LTCC production,green-tape pre-curing,after-print curing and other critical processes,green tape distortion problems might happen,such as center concavity,splits,warpage.While LTCC is achieved through precise alignment of green tape layers,and lamination,green-cut and co-fire processes followed;it is necessary to assure the processing quality of each layer.To achieve optimum surficial finish & positional registration accuracy,the paper focused on a introduction of frame-mounted LTCC green-tape curing...
Keywords:frame-mounted LTCC green tape  curing  LTCC(low temperature co-fired ceramic)  
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