Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances |
| |
Authors: | M Mubasher Saleem Shafaat A Bazaz |
| |
Affiliation: | (1) Faculty of Computer Science and Engineering, GIK Institute of Engineering Sciences and Technology, Topi, Khyber Pakhtunkhaw, Pakistan |
| |
Abstract: | This paper presents design of a structurally decoupled 3-DoF non-resonant MEMS gyroscope with increased robustness and gain.
The proposed design utilizes dynamic amplification in 2-DoF drive mode oscillator to achieve large gain. The device performance
is verified through behavioral model simulations considering the fabrication limitations of standard electroplated nickel
micromachining process, MetalMUMPs, of 20 μm structural layer thickness. A wide operational bandwidth of 1.74 kHz with dynamically
amplified again of 0.2 μm is achieved at low actuation voltages. A design sensitivity and Monte Carlo analysis is carried
out to show the robustness of the design, without any feedback control, within the fabrication process tolerances. Moreover
to verify the device performance under the application of angular velocity, a rate table characterization is carried out which
resulted in sense mass displacement of 30 nm corresponding to the rotation induced Coriolis force at actuation voltage of
20 VacV_{ac} and 30 VdcV_{dc} with angular rotation of 50 rad/s. Behavioral model simulations proved to be an cost-effective and time-saving alternative
to the traditional iterative fabrications and physical level simulations. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|