超光滑光学表面加工技术

现代科学技术的发展,在许多领域中提出了加工超光滑表面的要求。这种表面不仅要具备较高的面形精度和极低的表面粗糙度,同时要具有完整的表面晶格排布,消除加工损伤层。近年来国际出现了不少成功的超光滑表面加工技术,可以实现表面粗糙度小于1nm,面形精度优于30nm.本文介绍了超光滑表面的主要应用领域；从去除机理的角度讨论了BFP抛光、Teflon抛光、离子束加工、PACE加工、浮法抛光、延展性磨削等六种有代表性的超光滑表面加工技术；并对国内情况作了简单分析。

Fabricating Technology for Supersmooth Surfaces

Elements with supersmooth surfaces are demanded in many fields along with thedevelopment of modern science and technology, which present high contour accuracy,extremely Iow surface roughness,perfect crystalline distribution and nondamaged layers.Lots of new fabricating techniques have been applied to obtain supersmooth surfaces withsurface roughness < 1 nm and contour accuracy < 30 nm,This paper introduces theapplication of such surfaces,and from the point of stock removing mechanism,discusses 6different superpolishing techniques. Bowl Feed Polishing,Teflon Polishing,Ion Beanfiguring, Float Polishing,Plasma Assisted Chemical Etching,Ductile Grinding.