A method to simulate the vibrating characters of the resonator for resonant MEMS gyroscope

This paper proposes one study method of resonant MEMS gyroscope based on the circuit in order to solve problems such as long verification cycle and high cost of the MEMS gyroscope structure design. Firstly, on the basis of Euler–Bernoulli beam theory, this study establishes resonant beam vibration equation, obtains semi-Mathieu equation after normalization, namely parameter excitation characteristic equation of the frequency micro gyroscope, then deduces the characteristic equation in consideration of the damping condition, and uses the parameter perturbation method to study the output characteristic of gyroscope under ideal and damping states. Then, the analog circuit is innovatively used to obtain the characteristic equation of gyroscope under ideal and damping states, subsequently, the characteristic equation is normalized. It is realized that the dynamics equation is equivalent to the analog circuit. Finally, the experimental study is carried out, and experimental device for the frequency micro gyroscope harmonic oscillator parameter excitation characteristic is produced. Meanwhile, the analog circuit output waveform and frequency change correctness are verified by using the Runge–Kutta method and the parameter perturbation method, respectively. The experimental results show that the experiment device can be used to study the nonlinear vibration characteristics of the gyroscope.