Single-crystal diamond micro-cupped resonators made by laser ablation

This paper presents a novel three-dimensional fabrication process of micro-scale shell resonator made of single-crystal diamond (SCD) called micro-cupped resonator (MCR). The key feature of the process is the application of laser ablation, which can contribute to the shaping process of SCD with higher accuracy, better structural symmetry, greater speed, and lower breakage rate. UV laser high precision processing machine has been employed for the ablation of SCD in the present investigation. This paper describes the principle of laser ablation of SCD and analyses the effects of beam parameters on ablation quality. Then MCR with better structural symmetry and less structural imperfection has been successfully fabricated based on optimum parameters by laser ablation. The MCR is promising for emerging applications such as micro rate-integrating gyroscope.