固相合成法制备CaO-B2O3-SiO2系LTCC材料的研究

采用传统的固相合成工艺制备钙硼硅系LTCC粉体材料。考察了不同烧结温度和B2O3含量对材料性能的影响。实验结果表明,随着烧结温度升高,样品的致密化程度越高,但温度超过975℃会产生熔融和变形的现象。固定CaO与SiO2摩尔比为1.2∶1,当B2O3质量分数达到25%时,在950℃下烧结样品的性能较好:εr=6.06,tanδ=0.001 5(1MHz),弯曲强度σf≥180MPa,通过扫描电子显微镜观察其烧结的致密性较好;B2O3含量继续升高时,样品的力学性能和电学性能急剧恶化。

Study on CaO-B2O3-SiO2 LTCC Materials Prepared by Solid State

The CaO-B2O3-SiO2 LTCC powder materials were prepared by the solid state reaction technique.The effects of different sintering temperature and B2O3 contents on the materials’ properties were investigated.The results showed that the degree of densification increased with the increase of sintering temperatures;however,the melt and deformation were occurred when the sintering temperatures were over 975 ℃.The molar ratio of CaO to SiO2 was fixed as 1.2∶1.The sample with w(B2O3) of 25% at 950 ℃ exhibited preferable properties,that is εr=6.06,tan δ=0.001 5(1 MHz),flexural strength σf≥180 MPa,and observed by SEM the densification of sample is good.As the contents of B2O3 increased continuously,the mechanical properties and electrical properties were deteriorated dramatically.