| 提高HFCVD法合成金刚石中钨热解丝寿命的措施 |
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| 引用本文： | 邱万奇 周克崧. 提高HFCVD法合成金刚石中钨热解丝寿命的措施[J]. 理化检验(物理分册), 1999, 35(6): 248-250 |
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| 作者姓名： | 邱万奇 周克崧 |
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| 作者单位： | 华南理工大学 广州510641(邱万奇，刘正义，陈剑惠)，广州有色金属研究院 广州510641(周克崧，代明江，王德政，丁谦) |
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| 基金项目： | 广东省自然科学基金资助项目:B6-102-234 |
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| 摘 要： | ＨＦＣＶＤ法合成的金刚石中钨热解丝在沉积过程中因碳化而产生裂纹，在停机操作时钨热解丝因骤冷产生了热应力而断裂，停机操作前采用碳化钨还的技术及减缓钨丝冷却速度，可将钨丝的寿命提高３－５倍。
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| 关 键 词： | 钨丝 碳化 断裂 金刚石膜 HFCVD法 |
METHODS OF ENHANCING TUNGSTEN FILAMENT LIFESPAN IN DIAMOND DEPOSITION PROCESS BY HFCVD |
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| Qiu Wanqi Liu Zhengyi Chen Jianhui. METHODS OF ENHANCING TUNGSTEN FILAMENT LIFESPAN IN DIAMOND DEPOSITION PROCESS BY HFCVD[J]. Physical Testing and Chemical Analysis Part A:Physical Testing, 1999, 35(6): 248-250 |
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| Authors: | Qiu Wanqi Liu Zhengyi Chen Jianhui |
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| Abstract: | The conversion of W to W2C(or WC) resulted in cracks on tungsten filament surface in diamond deposition process by HFCVD. High thermal stress caused tungsten filament fracture when switching off the power. The tungsten life span is improved 3 to 5 times by reduction of tungsten carbide and decreasing filament cooling rate before switching off the tungsten filament power. |
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| Keywords: | Tungsten filament Carbonize Fracture |
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