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高频超声换能器技术研究进展与展望
引用本文:吴大伟.高频超声换能器技术研究进展与展望[J].振动.测试与诊断,2017,37(1):1-12.
作者姓名:吴大伟
作者单位:(南京航空航天大学机械结构力学及控制国家重点实验室,南京210016)
基金项目:国家自然科学基金资助项目(51675278)
摘    要:高频超声是超声技术前沿研究领域,可以提供更高的空间分辨率、更精准的检测诊断信息,在生物医学临床与基础研究、先进装备制造无损检测等领域具有重要的应用价值,但其核心器件高频超声换能器的研制一直是高频超声技术发展的瓶颈。首先,介绍了超声换能器基本理论;然后,论述了高频超声换能器技术发展现状、面临技术难题及解决途径,并结合高频超声换能器研制实例予以说明;最后,对高频超声换能器技术进行了讨论与展望。

关 键 词:高频超声    超声换能器    微加工    压电器件

Progress and Prospects of High-Frequency Ultrasonic Transducer Techniques
WU Dawei.Progress and Prospects of High-Frequency Ultrasonic Transducer Techniques[J].Journal of Vibration,Measurement & Diagnosis,2017,37(1):1-12.
Authors:WU Dawei
Affiliation:(State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics Nanjing, 210016, China)
Abstract:With its high spatial resolution and excellent detection capability, high-frequency ultrasound is a valuable tool in clinical studies, biomedical research, and nondestructive testing (NDT) of high value manufacturing (HVM). However, a major bottleneck in further progress is the development of ultrasonic transducers for high-frequency applications. In the paper, we introduce basic principles of ultrasonic transducers and briefly review existing ultrasonic transducer techniques. Following this, we address current technical challenges of high-frequency ultrasonic transducer techniques and provide practical solutions, illustrating our recent efforts to develop state-of-the-art high-freq uency ultrasonic transducer arrays. Finally, we discuss the future prospects of high-frequency ultrasonic transducer techniques.
Keywords:High-frequency ultrasound  ultrasonic transducers  micromachining  piezoelectric devices
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