Synthesis and characterization of zirconium oxynitride ZrOxNy coatings deposited via unbalanced DC magnetron sputtering |
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| Authors: | G.I. Cubillos J.J. Olaya M. Bethencourt G. Antorrena K. El Amrani |
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| Affiliation: | 1. Chemistry Department, College of Science, National University of Colombia, Bogotá, Colombia;2. Department of Mechanical Engineering and Mechatronics, College of Engineering, National University of Colombia, Bogotá, Colombia;3. Department of Materials Science, Metallurgical Engineering and Inorganic Chemistry, University of Cadiz, Marine Science and Technology Center of Andalucía, International Campus of Excellence of the Sea (CEI MAR), Avda. República de Saharaui, Puerto Real E-11510, Spain;4. Laboratorio de Microscopías Avanzadas (LMA) – Instituto de Nanociencia de Aragón (University of Zaragoza, Spain), 50009 Zaragoza, Spain;5. Department of Materials Science, Metallurgical Engineering and Inorganic Chemistry, Faculty of Marine Sciences, University of Cadiz, Avda. República de Saharaui, Puerto Real E-11510, Spain |
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| Abstract: | A study of structure, morphology, and corrosion resistance was performed on zirconium oxynitride thin films deposited on 304 and 316 stainless steels by the DC sputtering magnetron unbalance technique. Structural analysis was carried out using X-ray diffraction (XRD), while morphological analysis was performed by scanning electron microscopy (SEM), atomic force microscopy (AFM), and transmission electron microscopy (TEM). These studies were performed as a function of deposition time via DC sputtering at room temperature (287 K) with an Ar/air flow ratio of 3.0 and a total deposition time of 30 min. The oxynitride films were grown with cubic crystalline structures Zr2ON2 and preferentially oriented along the (222) plane. Chemical analysis determined that in the last 5.0 nm, the Zr coatings present the following spectral lines: Zr3d3/2 (184.6 eV) and 3d5/2 (181.7 eV), O1s (531.3 eV), and N1s (398.5 eV). |
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| Keywords: | Physical vapour deposition (PVD) Corrosion Epitaxial growth Coatings X-ray photo-emission spectroscopy (XPS) |
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