| TDR-ZY40C型中压单晶炉的研制 |
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| 引用本文： | 高利强,张红勇. TDR-ZY40C型中压单晶炉的研制[J]. 电子工业专用设备, 2004, 33(12): 69-72 |
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| 作者姓名： | 高利强 张红勇 |
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| 作者单位： | 西安理工大学,陕西,西安,710048;西安理工大学,陕西,西安,710048 |
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| 摘 要： | 介绍了TDR-ZY40C型单晶炉的设计思路及工作原理,结合拉制单晶的特殊工艺要求,分析了其主要结构及特点。
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| 关 键 词： | 单晶炉 结构 中压 |
| 文章编号： | 1004-4507(2004)12-0069-04 |
| 修稿时间： | 2004-11-12 |
Research and Manufacturing of the TDR-ZY40C Single Crystal Growth Furnace |
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| GAO Li-qiang ZHANG Hong-yong. Research and Manufacturing of the TDR-ZY40C Single Crystal Growth Furnace[J]. Equipment for Electronic Products Marufacturing, 2004, 33(12): 69-72 |
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| Authors: | GAO Li-qiang ZHANG Hong-yong |
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| Abstract: | The paper introduces the design ideas and principium of the ZY40C single crystal growth furnace according to the special technics of crystal' growing, interprets main structure and characteristic of the equipment ZY40C. |
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| Keywords: | Single crystal growth furnace Structure Middling pressure |
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