Mechanism of formation of the response of a hydrogen gas sensor based on a silicon MOS diode

Experimental data on the dependence of the flat-band voltage and relaxation time for the capacitance of the space-charge region in an MOS diode (Pd-SiO₂-n-Si) on the hydrogen concentration in a hydrogen/air gaseous mixture are discussed. It is assumed that variation in the flat-band voltage U _fb in an MOS structure with the thickness d = 369 nm subjected to a hydrogen/air gaseous mixture can be accounted for by the formation of dipoles in the Pd-SiO₂ gap due to polarization of hydrogen atoms (H _a ). An analytical expression describing the dependence of variation in the flat-band voltage ΔU _fb on the hydrogen concentration (n_{H_2 } ) was derived. In MOS structures with d ≤ 4 nm (or MOS diodes), the value of ΔU _fb is mainly controlled by passivation of the centers responsible for the presence of the surface acceptor-type centers at the SiO₂-n-Si interface by hydrogen atoms. Analytical expressions describing the dependences of ΔU _fb and the capacitance relaxation time in the space-charge region on (n_{H_2 } ) are derived. The values of the density of adsorption centers and the adsorption heat for hydrogen atoms at the Pd-SiO₂ and SiO₂-n-Si interfaces are found.