High performance electric field micro sensor with combined differential structure |
| |
| Authors: | Xiaolong Wen Chunrong Peng Dongming Fang Pengfei Yang Bo Chen Fengjie Zheng Shanhong Xia |
| |
| Affiliation: | *(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China) **(University of Chinese Academy of Sciences, Beijing 100049, China) ***(National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China) |
| |
| Abstract: | This paper presents a high performance electric field micro sensor with combined differential structure. The sensor consists of two backward laid micro-machined chips, each packaged by polymer and metal. The novel combined differential structure effectively reduces various environmental affections, such as thermal drift, humidity drift and electrostatic charge accumulation. The sensor is tested in near-ground place as well as balloon-borne sounding. In different weather conditions, the measurement results showed good agreement with those of the commercial electric field mill. |
| |
| Keywords: | Key words Micro-Electro-Mechanical System (MEMS) Electric field sensor Atmospheric electric field Differential structure |
| 本文献已被 CNKI 维普 SpringerLink 等数据库收录！ |
| 点击此处可从《电子科学学刊(英文版)》浏览原始摘要信息 |
|
点击此处可从《电子科学学刊(英文版)》下载全文 |
|
