| 电磁屏蔽膜设备的开发及应用 |
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| 引用本文： | 朱建明,戴晋福. 电磁屏蔽膜设备的开发及应用[J]. 真空电子技术, 2007, 0(3): 73-74 |
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| 作者姓名： | 朱建明 戴晋福 |
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| 作者单位： | 肇庆市科润真空设备有限公司,广东,肇庆,526060 |
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| 摘 要： | 介绍了国内外对电磁屏蔽膜(EMI)研究的现状,比较了制备EMI膜的各种方法,指出采用磁控溅射法制备的EMI膜质量较好,并给出制备EMI膜的工艺流程。
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| 关 键 词： | 薄膜 电磁屏蔽 磁控溅射 |
| 文章编号： | 1002-8935（2007）03-0073-02 |
| 修稿时间： | 2007-01-27 |
Development and Application of the Equipment for Electromagnetic Shielding Films |
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| ZHU Jian-ming,DAI Jin-fu. Development and Application of the Equipment for Electromagnetic Shielding Films[J]. Vacuum Electronics, 2007, 0(3): 73-74 |
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| Authors: | ZHU Jian-ming DAI Jin-fu |
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| Affiliation: | Zhaoqing Kerun Vacuum Equipment Ltd. , Zhaoqing 526060, China |
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| Abstract: | The present studying situations of electromagnetic shielding films(EMI) abroad are introduced,and several preparing methods of EMI films are compared in the paper.It is point out that the EMI films prepared by magnetron-sputtering method have good qualities.Finally,the EMI preparing process is presented. |
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| Keywords: | Thin film Electromagnetic shielding Magnetron-sputtering |
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