| 基于部件库的MEMS设计方法 |
| |
| 引用本文： | 卢桂章,赵新. 基于部件库的MEMS设计方法[J]. 微纳电子技术, 2003, 0(Z1) |
| |
| 作者姓名： | 卢桂章 赵新 |
| |
| 作者单位： | 南开大学机器人与信息自动化研究所 天津300071(卢桂章)，南开大学机器人与信息自动化研究所 天津300071(赵新) |
| |
| 摘 要： | 针对当前MEMS设计工具中机械性能评测不充分的问题 ,提出了基于部件库的MEMS设计方法 ;介绍了部件及部件库的概念和基于部件库的MEMS设计环境的总体结构及关键技术。完成了各关键技术的攻关 ,并建立了一个原形系统。
|
| 关 键 词： | MEMS设计 部件库 虚拟现实 |
Partlibrarybased method of MEMS design |
| |
| LU Gui zhang,ZHAO Xin. Partlibrarybased method of MEMS design[J]. Micronanoelectronic Technology, 2003, 0(Z1) |
| |
| Authors: | LU Gui zhang ZHAO Xin |
| |
| Abstract: | In accordance with the insufficiency of mechanical performance evaluation in the testing of MEMS design tool at present, part library based method of MEMS design is put forward. Firstly, the concept of parts and part library are summarized; then, the overall structure and the critical technology of the environment of part library based method of MEMS design are introduced. We had accomplished various key problems, and built a prototype system. The method put forward in this paper is the profitable additional of now available MEMS design tools. |
| |
| Keywords: | MEMS design part library virtual reality |
| 本文献已被 CNKI 等数据库收录！ |
|
