New method for determining distribution of interface states in an MIS system |
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| Authors: | Yamaguchi E Kobayashi T |
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| Affiliation: | NTT, Musashino Electrical Communication Laboratory, Musashino, Japan; |
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| Abstract: | A general formula for the capacitance transient response in an MIS system was developed in order to apply the ICTS (isothermal capacitance transient spectroscopy) technique to an MIS diode. A new spectroscopic measurement method for determining the distribution of interface states is proposed and applied to an InAs MIS diode. |
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