| ZnO:Al薄膜的组织结构与性能 |
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| 引用本文： | 裴志亮,谭明晖,杜昊,陈猛,孙超,黄荣芳,闻立时. ZnO:Al薄膜的组织结构与性能[J]. 材料研究学报, 2000, 14(5): 538-542 |
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| 作者姓名： | 裴志亮 谭明晖 杜昊 陈猛 孙超 黄荣芳 闻立时 |
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| 作者单位： | 中国科学院金属研究所 |
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| 基金项目： | 沈阳市科委基金资助项目 |
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| 摘 要： | 用直流磁控反应溅射合金制备了ＺｎＯ薄膜，研究了衬底温度和退火温度对薄膜的结构及电学和光学性能的影响。衬底温度升高能改善薄膜的电学特性，其原因是薄膜晶粒尺寸的增大。温度升高导致薄膜基本光学吸收边向短波移动，但对高透射区（４５０～８５０ｎｍ）的透射率影响不大。
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| 关 键 词： | ZnO薄膜 透射率 合金靶Al／Zn 组织结构 性能 |
| 文章编号： | 1005-3093(2090)05-0538-05 |
| 修稿时间： | 1999-10-10 |
EFFECT OF TEMPERATURE ON THE PROPERTIES OF ZnO THIN FILMS |
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| PEI Zhiliang,TAN Minghui,DU Hao,CHEN Meng,SUN Chao,HUANG Rongfang,WEN Lishi. EFFECT OF TEMPERATURE ON THE PROPERTIES OF ZnO THIN FILMS[J]. Chinese Journal of Materials Research, 2000, 14(5): 538-542 |
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| Authors: | PEI Zhiliang TAN Minghui DU Hao CHEN Meng SUN Chao HUANG Rongfang WEN Lishi |
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| Abstract: | The dependence of properties of ZnO films prepared by dc magnetron reactive sputtering on temperature was investigated. The results showed that the effect of temperature on electrical properties was attributed to the improvement of crystalline. The sharp fundamental absorption edge was observed shift to short wavelength but no significant effect of temperature on the transmittance in the visible region of 450-850nm was noticed. However, few studies of the conduction mechanism in heavily doped ZnO have been reported; the origin and scattering mechanism of carriers have not been clarified. The possible mechanism was discussed as well. |
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| Keywords: | ZnO films temperatuer optical absorption edge transmittance |
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