| 投影光刻机中PDP-11主控制计算机系统的替换 |
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| 引用本文： | 曾美芹. 投影光刻机中PDP-11主控制计算机系统的替换[J]. 电子工业专用设备, 2011, 40(8): 38-40 |
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| 作者姓名： | 曾美芹 |
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| 作者单位： | 上海微高精密机械工程有限公司,上海,201203 |
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| 摘 要： | 介绍了针对早期的投影光刻机存在PDP-11计算机速度慢,控制系统难操作的问题,利用普通PC机通过GPIB卡替换了PDP-11计算机,使用VB语言编写的程序替换了主控制系统程序。
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| 关 键 词： | PDP-11计算机 GPIB卡 投影光刻机 VB |
The PDP-11 computer system of Step-and-Repeat lithography machine replaced |
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| ZENG Meiqin. The PDP-11 computer system of Step-and-Repeat lithography machine replaced[J]. Equipment for Electronic Products Marufacturing, 2011, 40(8): 38-40 |
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| Authors: | ZENG Meiqin |
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| Affiliation: | ZENG Meiqin (Shanghai Nanpre Mechanics.,LTD.,Shanghai 201203,China) |
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| Abstract: | Introduced for the early Step-and-Repeat lithography machine there PDP-11 computer is slow,difficult to control system operation problem,the use of ordinary PC through the GPIB card replaced the PDP-11 computer,using programs written in VB language replaced the main control system program. |
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| Keywords: | PDP-11 computer GPIB card Step-and-Repeat lithography machine VB |
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