| 半导体设备中铝合金精密零件尺寸稳定性工艺研究 |
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| 引用本文： | 张雅丽.半导体设备中铝合金精密零件尺寸稳定性工艺研究[J].电子工业专用设备,2011,40(8):51-53. |
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| 作者姓名： | 张雅丽 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,101601 |
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| 摘 要： | 通过对半导体设备中LY12铝合金类高精度、薄壁零件的尺寸稳定性研究,分析了影响零件尺寸稳定性的因素,选取了一道人工时效处理和三道各循环三次的冷热循环稳定处理工艺方案,使整个零组件从加工、装配、产品测试到库存,再到成品试验的自然时效时间内,原加工精度经过再次复测,没有发生变化。
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| 关 键 词： | LY12硬铝合金 “CZ”状态 冷热循环稳定处理 |
The Study of Technology on Dimensional Stability of Aluminum Precision Parts In Semiconductor Machine |
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| ZHANG Yali.The Study of Technology on Dimensional Stability of Aluminum Precision Parts In Semiconductor Machine[J].Equipment for Electronic Products Marufacturing,2011,40(8):51-53. |
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| Authors: | ZHANG Yali |
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| Affiliation: | ZHANG Yali (The 45th Research Institute of CETC,,Bejing 101601,China) |
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| Abstract: | According to analyzed the factors affecting the dimensional stability of high-precision,thin-walled parts of LY12 aluminum alloy,study the technology process of controlled deformation.Selected an artificial aging treatment and three stable treatment process which circulate three times of hot and cold cycles,so that the period of natural aging from parts processing,assembly,product testing to sotck,the original precision not change by retest again. |
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| Keywords: | LY12 Duralumin Alloy ＂CZ＂ State Steady Disposal on Cool and Heat Revolve |
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