Productivity and Efficiency of Ozone Synthesis in Coplanar Discharge Arrangements

In order determine the potential of coplanar discharge arrangements with short electrode distances for the production of ozone, a numerical model of the discharge behavior has been developed. The temporal and spatial distributions of the discharge parameters e.g. those of the field strength, the densities of the charged particles in the gas region and on the dielectric surface and that of the energy release reveal that the ozone production results from the electron phase of the discharge. Quantitative data of the productivity and efficiency of the ozone yield in a certain system are presented, which are in agreement with experimental results.