New thermoelectric components using microsystem technologies |
| |
| Authors: | Bottner H. Nurnus J. Gavrikov A. Kuhner G. Jagle M. Kunzel C. Eberhard D. Plescher G. Schubert A. Schlereth K.-H. |
| |
| Affiliation: | Fraunhofer Inst. Phys. Messtechnik, Freiburg, Germany; |
| |
| Abstract: | This paper describes the first thermoelectric devices based on the V-VI-compounds Bi/sub 2/Te/sub 3/ and (Bi,Sb)/sub 2/Te/sub 3/ which can be manufactured by means of regular thin film technology in combination with microsystem technology. Fabrication concept, material deposition for some 10-/spl mu/m-thick layers and the properties of the deposited thermoelectric materials will be reported. First device properties for Peltier-coolers and thermogenerators will be shown as well as investigations on long term and cycling stability. Data on metal/semiconductor contact resistance were extracted form device data. Device characteristics like response time for a Peltier-cooler and power output for a thermogenerator will be compared to commercial devices. |
| |
| Keywords: | |
|
|
