Choice of power-supply voltage for half-micrometer and lowersubmicrometer CMOS devices

The tradeoff between circuit performance and reliability is theoretically and experimentally examined in detail, down to half-micrometer and lower submicrometer gate lengths, taking into account high-field effects on MOSFETs. Some guidelines for optimum power-supply voltage and process/device parameters for half-micrometer and lower submicrometer CMOS devices are proposed in order to maintain MOS device reliability and achieve high circuit performance. It is shown that power-supply voltage must be reduced to maintain reliability and improved performance and that the optimum voltage reduction follows the square root of the design rule. Trends for scaling down power-supply voltage have been experimentally verified by results obtained from measurements on CMOS devices over a wide range of gate oxide thickness (7-45 nm) and gate lengths (0.3-2.0 μm)