| 氮化碳薄膜的红外光谱(FTIR)特性分析 |
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| 引用本文： | 毕凯,刘军,陈春. 氮化碳薄膜的红外光谱(FTIR)特性分析[J]. 矿冶工程, 2006, 26(3): 81-83 |
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| 作者姓名： | 毕凯 刘军 陈春 |
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| 作者单位： | 镇江船艇学院,物理教研室,江苏,镇江,212003;江苏大学,材料科学与工程学院,江苏,镇江,212013 |
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| 摘 要： | 对采用磁控溅射法制备的氮化碳(CNx)薄膜进行了傅里叶变换红外光谱(FTIR)的测量与特性分析。结果表明,薄膜中含有C-N键、C==N键以及C-N键, 但样品中碳氮键总体数量偏少, N含量偏低, N/C比偏低。改变制备工艺条件, 薄膜中原子的化学结合状况会发生相应的变化。
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| 关 键 词： | 氮化碳薄膜 红外光谱 磁控溅射 |
| 文章编号： | 0253-6099(2006)03-0081-03 |
| 收稿时间： | 2005-09-19 |
| 修稿时间： | 2005-09-19 |
Fourier Transform Infrared Spectroscopic Characteristics Studies of Carbon Nitride Films |
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| BI Kai,LIU Jun,CHEN Chun. Fourier Transform Infrared Spectroscopic Characteristics Studies of Carbon Nitride Films[J]. Mining and Metallurgical Engineering, 2006, 26(3): 81-83 |
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| Authors: | BI Kai LIU Jun CHEN Chun |
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| Affiliation: | 1. Department of Physics, Zhenjiang Watercraft College, Zhenjiang 212003, Jiangsu, China; 2. College of Material Science and Engineering, Jiangsu University, Zhenjiang 212003, Jiangsu, China |
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| Abstract: | The Fourier transform infrared(FTIR)spectrum of carbon nitride films prepared by magneto controlled sputtering technique were investigated.There are some absorption peaks of the covalent carbon nitrogen single bond,carbon nitrogen double bond and carbon nitrogen triple bond in the FTIR spectra,while there is a smaller amount of carbon nitride bond,a less content of N and a lower proportion of N/C in the sample.When adjusting experimental conditions,the atomic binding situation of films will also change. |
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| Keywords: | carbon nitride films infrared spectroscopy magneto controlled sputtering |
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