Optical and structural study of EB-PVD ZrO2 thin films |
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| Affiliation: | 1. Ministry of Education and Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;2. Key Laboratory of Material Science and Technology for High Power Lasers, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China;1. Otto-Schott-Institut für Materialforschung, Jena University, Fraunhoferstr. 6, 07743 Jena, Germany;2. Fraunhofer-Institut für Mikrostruktur von Werkstoffen und Systemen IMWS, Walter-Hülse-Straße 1, 06120 Halle (Saale), Germany |
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| Abstract: | The behaviour of the crystalline properties of ZrO2 films prepared by electron beam physical vapour deposition (EB-PVD) is investigated as a function of their deposition rates. In this paper, the conditions for the preparation of tetragonal zirconia from yttria stabilized zirconia and from monoclinic powder as starting materials are reported. The variation of the crystallite size as a function of the deposition rate is studied and, additionally, the optical characterization that permits to determine the refractive index is presented. The obtained values are in agreement with the bulk ones showing that EB-PVD prepared samples have good performance for optical and protective coatings. |
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